Tomohiro Harayama

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating apparatus, imprint apparatus, and method of manufacturing a...
- Patent number 10,571,801
- Issue date Feb 25, 2020
- Canon Kabushiki Kaisha
- Kunihiko Asada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 9,285,688
- Issue date Mar 15, 2016
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing device
- Patent number 9,158,211
- Issue date Oct 13, 2015
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control apparatus, lithography apparatus, and method of manufacturi...
- Patent number 9,140,997
- Issue date Sep 22, 2015
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, calibration method, and method of manufacturing...
- Patent number 8,988,656
- Issue date Mar 24, 2015
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning exposure apparatus and device manufacturing method
- Patent number 8,400,611
- Issue date Mar 19, 2013
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device manufacturing method
- Patent number 7,692,761
- Issue date Apr 6, 2010
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING SPREAD OF PLURALITY OF DROPLET...
- Publication number 20240255853
- Publication date Aug 1, 2024
- Canon Kabushiki Kaisha
- TOMOHIRO HARAYAMA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20240045325
- Publication date Feb 8, 2024
- Canon Kabushiki Kaisha
- TOMOHIRO HARAYAMA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD HOLDING MECHANISM, IMPRINT APPARATUS, AND ARTICLE MANUFACTURIN...
- Publication number 20170028613
- Publication date Feb 2, 2017
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
COATING APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...
- Publication number 20160161868
- Publication date Jun 9, 2016
- Canon Kabushiki Kaisha
- Kunihiko Asada
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
STAGES, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING DEVICES
- Publication number 20160161854
- Publication date Jun 9, 2016
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20140104590
- Publication date Apr 17, 2014
- Canon Kabushiki Kaisha
- Tomohiro HARAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS, CALIBRATION METHOD, AND METHOD OF MANUFACTURING...
- Publication number 20140016111
- Publication date Jan 16, 2014
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...
- Publication number 20130265558
- Publication date Oct 10, 2013
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20120170008
- Publication date Jul 5, 2012
- Canon Kabushiki Kaisha
- Keiji EMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100123891
- Publication date May 20, 2010
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...
- Publication number 20100002212
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Tomohiro Harayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tomohiro Harayama

Person

Patents Grantslast 30 patents

Coating apparatus, imprint apparatus, and method of manufacturing a...

Exposure apparatus and method of manufacturing device

Exposure apparatus and method of manufacturing device

Control apparatus, lithography apparatus, and method of manufacturi...

Exposure apparatus, calibration method, and method of manufacturing...

Scanning exposure apparatus and device manufacturing method

Exposure apparatus and method, and device manufacturing method

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR CONTROLLING SPREAD OF PLURALITY OF DROPLET...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

MOLD HOLDING MECHANISM, IMPRINT APPARATUS, AND ARTICLE MANUFACTURIN...

COATING APPARATUS, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING A...

STAGES, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING DEVICES

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

EXPOSURE APPARATUS, CALIBRATION METHOD, AND METHOD OF MANUFACTURING...

CONTROL APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURI...

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

SCANNING EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

SCANNING EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTUR...