Tomohiro Iijima

Person

Numazu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 10,020,159
- Issue date Jul 10, 2018
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,570,267
- Issue date Feb 14, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method and multi charged partic...
- Patent number 9,202,673
- Issue date Dec 1, 2015
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Data verification method and charged particle beam writing apparatus
- Patent number 8,423,921
- Issue date Apr 16, 2013
- Nuflare Technology, Inc.
- Yujin Handa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 8,352,889
- Issue date Jan 8, 2013
- Nuflare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for writing
- Patent number 8,309,283
- Issue date Nov 13, 2012
- Nuflare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 7,872,745
- Issue date Jan 18, 2011
- Nuflare Technology, Inc.
- Takayuki Abe
- G01 - MEASURING TESTING
Information Patent Grant
Beam dose computing method and writing method and record carrier bo...
- Patent number 7,740,991
- Issue date Jun 22, 2010
- Nuflare Technology, Inc.
- Keiko Emi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern area value calculating method, proximity effect correcting...
- Patent number 7,657,863
- Issue date Feb 2, 2010
- Nuflare Technology, Inc.
- Tomohiro Iijima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus and readable sto...
- Patent number 7,619,230
- Issue date Nov 17, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and method thereof, and met...
- Patent number 7,608,845
- Issue date Oct 27, 2009
- Nuflare Technology, Inc.
- Takayuki Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus
- Patent number 7,511,290
- Issue date Mar 31, 2009
- Nuflare Technology, Inc.
- Junichi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam drawing apparatus and charged beam drawing method
- Patent number 7,476,881
- Issue date Jan 13, 2009
- Nuflare Technology, Inc.
- Kiyoshi Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern writing method
- Patent number 6,346,354
- Issue date Feb 12, 2002
- Kabushiki Kaisha Toshiba
- Takayuki Abe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged beam lithography system
- Patent number 6,313,476
- Issue date Nov 6, 2001
- Kabushiki Kaisha Toshiba
- Mitsuko Shimizu
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20180261421
- Publication date Sep 13, 2018
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20170098524
- Publication date Apr 6, 2017
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20160042908
- Publication date Feb 11, 2016
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
- Publication number 20140124684
- Publication date May 8, 2014
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20120108063
- Publication date May 3, 2012
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR WRITING
- Publication number 20100173235
- Publication date Jul 8, 2010
- NuFlare Technology, Inc.
- Yasuo KATO
- B82 - NANO-TECHNOLOGY
Information Patent Application
DATA VERIFICATION METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20090285494
- Publication date Nov 19, 2009
- NuFlare Technology, Inc.
- Yujin HANDA
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20090040513
- Publication date Feb 12, 2009
- NuFlare Technology, Inc.
- Takayuki ABE
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF, AND MET...
- Publication number 20080182185
- Publication date Jul 31, 2008
- NuFlare Technology, Inc.
- Takayuki Abe
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS
- Publication number 20070194250
- Publication date Aug 23, 2007
- NuFlare Technology, Inc.
- Junichi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN AREA VALUE CALCULATING METHOD, PROXIMITY EFFECT CORRECTING...
- Publication number 20070170374
- Publication date Jul 26, 2007
- NuFlare Technology, Inc.
- Tomohiro Iijima
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS AND READABLE STO...
- Publication number 20070114459
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Junichi SUZUKI
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD
- Publication number 20070114461
- Publication date May 24, 2007
- Kiyoshi HATTORI
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...
- Publication number 20070114453
- Publication date May 24, 2007
- NuFlare Technology, Inc.
- Keiko Emi
- B82 - NANO-TECHNOLOGY

Tomohiro Iijima

Person

Patents Grantslast 30 patents

Multi charged particle beam writing method and multi charged partic...

Multi charged particle beam writing method and multi charged partic...

Multi charged particle beam writing method and multi charged partic...

Data verification method and charged particle beam writing apparatus

Beam dose computing method and writing method and record carrier bo...

Method and apparatus for writing

Pattern inspection apparatus and pattern inspection method

Beam dose computing method and writing method and record carrier bo...

Pattern area value calculating method, proximity effect correcting...

Charged particle beam writing method and apparatus and readable sto...

Charged particle beam writing apparatus and method thereof, and met...

Charged particle beam writing method and apparatus

Charged beam drawing apparatus and charged beam drawing method

Pattern writing method

Charged beam lithography system

Patents Applicationslast 30 patents

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...

METHOD AND APPARATUS FOR WRITING

DATA VERIFICATION METHOD AND CHARGED PARTICLE BEAM WRITING APPARATUS

PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD THEREOF, AND MET...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS

PATTERN AREA VALUE CALCULATING METHOD, PROXIMITY EFFECT CORRECTING...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS AND READABLE STO...

CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD

BEAM DOSE COMPUTING METHOD AND WRITING METHOD AND RECORD CARRIER BO...