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Tomohiro Ishiguro
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Kanagawa, JP
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last 30 patents
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Patent Grant
Apparatus for evaluating polysilicon film
Patent number
6,798,498
Issue date
Sep 28, 2004
Sony Corporation
Hiroyuki Wada
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Apparatus for evaluating polysilicon film
Publication number
20020145733
Publication date
Oct 10, 2002
SONY CORPORATION
Hiroyuki Wada
G01 - MEASURING TESTING