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Tomohiro IWANE
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Tokyo, JP
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last 30 patents
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Patent Grant
Charged particle beam device, optical device, irradiation method, d...
Patent number
10,210,962
Issue date
Feb 19, 2019
HITACHI , LTD.
Ken Harada
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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last 30 patents
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Patent Application
CHARGED PARTICLE BEAM DEVICE, OPTICAL DEVICE, IRRADIATION METHOD, D...
Publication number
20170194065
Publication date
Jul 6, 2017
Hitachi, Ltd
Ken HARADA
G02 - OPTICS