Tomohiro Kubota

Person

Hachioji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 12,129,548
- Issue date Oct 29, 2024
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming structures using a neutral beam
- Patent number 11,643,724
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for etching a carbon-containing feature
- Patent number 10,811,256
- Issue date Oct 20, 2020
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of spacer-defined direct patterning in semiconductor fabrica...
- Patent number 10,658,181
- Issue date May 19, 2020
- ASM IP Holding B.V.
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a silicon nitride film
- Patent number 10,381,219
- Issue date Aug 13, 2019
- ASM IP Holding B.V.
- Shinya Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming vertical spacers for spacer-defined patterning
- Patent number 10,290,508
- Issue date May 14, 2019
- ASM IP Holding B.V.
- Tomohiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...
- Publication number 20230340663
- Publication date Oct 26, 2023
- ASM IP HOLDING B.V.
- Fanyong Ran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
- Publication number 20230250531
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...
- Publication number 20220350248
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR FORMING SILICON NITRIDE ON A SIDEWALL OF A FE...
- Publication number 20220108881
- Publication date Apr 7, 2022
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...
- Publication number 20210017648
- Publication date Jan 21, 2021
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ETCHING A CARBON-CONTAINING FEATURE
- Publication number 20200118811
- Publication date Apr 16, 2020
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SPACER-DEFINED DIRECT PATTERNING IN SEMICONDUCTOR FABRICA...
- Publication number 20190259612
- Publication date Aug 22, 2019
- ASM IP HOLDING B.V.
- Toshihisa Nozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING VERTICAL SPACERS FOR SPACER-DEFINED PATTERNING
- Publication number 20190172718
- Publication date Jun 6, 2019
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Tomohiro Kubota

Person

Patents Grantslast 30 patents

Method of forming structures using a neutral beam

Method of forming structures using a neutral beam

Method for etching a carbon-containing feature

Method of spacer-defined direct patterning in semiconductor fabrica...

Methods for forming a silicon nitride film

Method for forming vertical spacers for spacer-defined patterning

Patents Applicationslast 30 patents

PLASMA-ENHANCED METHOD AND SYSTEM FOR FORMING A SILICON OXYCARBIDE...

METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...

METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...

METHOD AND SYSTEM FOR FORMING SILICON NITRIDE ON A SIDEWALL OF A FE...

METHOD OF FORMING STRUCTURES USING A NEUTRAL BEAM, STRUCTURES FORME...

METHOD FOR ETCHING A CARBON-CONTAINING FEATURE

METHOD OF SPACER-DEFINED DIRECT PATTERNING IN SEMICONDUCTOR FABRICA...

METHOD FOR FORMING VERTICAL SPACERS FOR SPACER-DEFINED PATTERNING