Tomohiro MATSUMURA

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Patents Grantslast 30 patents

Information Patent Grant
Washing method of semiconductor manufacturing device component havi...
- Patent number 11,753,714
- Issue date Sep 12, 2023
- Shinryo Corporation
- Tomohiro Matsumura
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR IMPROVING ADHESION OF YTTRIUM-BASED THIN FILM
- Publication number 20240229241
- Publication date Jul 11, 2024
- SHINRYO CORPORATION
- Yuriko YANAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IMPROVING ADHESION OF YTTRIUM-BASED THIN FILM
- Publication number 20240133037
- Publication date Apr 25, 2024
- SHINRYO CORPORATION
- Yuriko YANAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WASHING METHOD OF SEMICONDUCTOR MANUFACTURING DEVICE COMPONENT HAVI...
- Publication number 20220136101
- Publication date May 5, 2022
- Shinryo Corporation
- Tomohiro MATSUMURA
- B08 - CLEANING