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Tomohiro NAKAMURA
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Tochigi, JP
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Patents Grants
last 30 patents
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Patent Grant
Luminous flux branching element and mask defect inspection apparatus
Patent number
8,767,200
Issue date
Jul 1, 2014
Nuflare Technology, Inc.
Riki Ogawa
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
LUMINOUS FLUX BRANCHING ELEMENT AND MASK DEFECT INSPECTION APPARATUS
Publication number
20130176559
Publication date
Jul 11, 2013
NuFlare Technology, Inc.
Riki OGAWA
G02 - OPTICS