Tomohiro NAKASHIMA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus, substrate treatment method and non-t...
- Patent number 8,885,140
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Tomohiro Nakashima
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND NON-T...
- Publication number 20130057836
- Publication date Mar 7, 2013
- TOKYO ELECTRON LIMITED
- Tomohiro NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS