Tomohiro OHASHI

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Shunan, JP

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing based on sensor detection and system learning
- Patent number 8,897,906
- Issue date Nov 25, 2014
- Hitachi High-Technologies Corporation
- Tomohiro Ohashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,569,177
- Issue date Oct 29, 2013
- Hitachi High-Technologies Corporation
- Tomohiro Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum chamber
- Patent number 8,532,818
- Issue date Sep 10, 2013
- Hitachi High-Technologies Corporation
- Tomohiro Ohashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130189800
- Publication date Jul 25, 2013
- Tomohiro OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
- Publication number 20130053997
- Publication date Feb 28, 2013
- Tomohiro Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM CHAMBER
- Publication number 20110137454
- Publication date Jun 9, 2011
- Tomohiro OHASHI
- H01 - BASIC ELECTRIC ELEMENTS