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Tomohiro Ohashi
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Tokyo, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
9,263,313
Issue date
Feb 16, 2016
Hitachi High-Technologies Corporation
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20140295671
Publication date
Oct 2, 2014
Kohei Sato
H01 - BASIC ELECTRIC ELEMENTS