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Tomohiro OIKAWA
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of forming pattern
Patent number
9,529,266
Issue date
Dec 27, 2016
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative tone resist composition for solvent developing and method...
Patent number
9,459,528
Issue date
Oct 4, 2016
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and method of forming resist pattern
Patent number
9,128,374
Issue date
Sep 8, 2015
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD
Publication number
20190354011
Publication date
Nov 21, 2019
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro OIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ACID GENERAT...
Publication number
20170176855
Publication date
Jun 22, 2017
Tokyo Ohka Kogyo Co., Ltd.
Takashi NAGAMINE
C07 - ORGANIC CHEMISTRY
Information
Patent Application
METHOD OF FORMING PATTERN
Publication number
20150185619
Publication date
Jul 2, 2015
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NEGATIVE TONE RESIST COMPOSITION FOR SOLVENT DEVELOPING AND METHOD...
Publication number
20140363770
Publication date
Dec 11, 2014
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20140147790
Publication date
May 29, 2014
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY