Tomohiro OOTA

Person

  • Nirasaki, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming apparatus

    • Patent number 9,885,114
    • Issue date Feb 6, 2018
    • Tokyo Electron Limited
    • Tetsuya Saitou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS

    • Publication number 20150322571
    • Publication date Nov 12, 2015
    • TOKYO ELECTRON LIMITED
    • Hideaki YAMASAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS

    • Publication number 20150267298
    • Publication date Sep 24, 2015
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...