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Tomohiro OOTA
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Nirasaki, JP
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last 30 patents
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Patent Grant
Film forming apparatus
Patent number
9,885,114
Issue date
Feb 6, 2018
Tokyo Electron Limited
Tetsuya Saitou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20150322571
Publication date
Nov 12, 2015
TOKYO ELECTRON LIMITED
Hideaki YAMASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
FILM FORMING APPARATUS
Publication number
20150267298
Publication date
Sep 24, 2015
TOKYO ELECTRON LIMITED
Tetsuya SAITOU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...