Tomohiro Saito

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Failure detection system and failure detection method
- Patent number 11,526,160
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Yuka Nakasato
- G05 - CONTROLLING REGULATING
Information Patent Grant
Vacuum exhaust method
- Patent number 10,014,145
- Issue date Jul 3, 2018
- Tokyo Electron Limited
- Tomohiro Saito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
RAW MATERIAL FEEDING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND RESID...
- Publication number 20230070064
- Publication date Mar 9, 2023
- TOKYO ELECTRON LIMITED
- Hiroyuki KARASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAILURE DETECTION SYSTEM AND FAILURE DETECTION METHOD
- Publication number 20210124341
- Publication date Apr 29, 2021
- TOKYO ELECTRON LIMITED
- Yuka NAKASATO
- G05 - CONTROLLING REGULATING
Information Patent Application
VACUUM EXHAUST METHOD
- Publication number 20170345609
- Publication date Nov 30, 2017
- Tomohiro SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA NITRIDING METHOD AND PLASMA NITRIDING APPARATUS
- Publication number 20130017690
- Publication date Jan 17, 2013
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS