Tomohiro UEMURA

Follow

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,464,107
- Issue date Nov 5, 2019
- SCREEN Holdings Co., Ltd.
- Keiji Iwata
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150114432
- Publication date Apr 30, 2015
- SCREEN Holdings Co., Ltd.
- Keiji IWATA
- B08 - CLEANING