Tomohiro Yoshimura

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and semiconductor device producing m...
- Patent number 8,901,011
- Issue date Dec 2, 2014
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor device producing m...
- Patent number 7,950,348
- Issue date May 31, 2011
- Hitachi Kokusai Electric Inc.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and semiconductor device producing m...
- Patent number 6,790,687
- Issue date Sep 14, 2004
- Hitachi Kokusai Electric Inc.
- Tomohiro Yoshimura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING M...
- Publication number 20150050818
- Publication date Feb 19, 2015
- Hitachi Kokusai Electric Inc.
- Masanori SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE PRODUCING M...
- Publication number 20110212626
- Publication date Sep 1, 2011
- Masanori SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Semiconductor Device Producing M...
- Publication number 20080153309
- Publication date Jun 26, 2008
- HITACHI KOKUSAI8 ELECTRIC INC.
- Masanori Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus and semiconductor device producing m...
- Publication number 20030230562
- Publication date Dec 18, 2003
- Tomohiro Yoshimura
- G01 - MEASURING TESTING