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Toyko, JP
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last 30 patents
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Patent Grant
Specimen stage-moving device for charged-particle beam system
Patent number
8,008,633
Issue date
Aug 30, 2011
Jeol, Ltd.
Yoshinori Fujiyoshi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Specimen Stage-Moving Device for Charged-Particle Beam System
Publication number
20090230319
Publication date
Sep 17, 2009
JEOL, LTD
Yoshinori Fujiyoshi
H01 - BASIC ELECTRIC ELEMENTS