Tomohisa KIMOTO

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Raw material supply apparatus and film forming apparatus
- Patent number 11,873,556
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Tomohisa Kimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pipe heating device and substrate processing apparatus
- Patent number 11,506,321
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Tomohisa Kimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Valve device, processing apparatus, and control method
- Patent number 11,306,847
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Tomohisa Kimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source material container
- Patent number 11,193,205
- Issue date Dec 7, 2021
- Tokyo Electron Limited
- Yuichi Furuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
- Publication number 20220356581
- Publication date Nov 10, 2022
- Tokyo Electron Limited
- Kensaku NARUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAW MATERIAL SUPPLY APPARATUS AND FILM FORMING APPARATUS
- Publication number 20210324513
- Publication date Oct 21, 2021
- TOKYO ELECTRON LIMITED
- Tomohisa KIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pipe Heating Device and Substrate Processing Apparatus
- Publication number 20200182390
- Publication date Jun 11, 2020
- TOKYO ELECTRON LIMITED
- Tomohisa KIMOTO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VALVE DEVICE, PROCESSING APPARATUS, AND CONTROL METHOD
- Publication number 20200056724
- Publication date Feb 20, 2020
- TOKYO ELECTRON LIMITED
- Tomohisa KIMOTO
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SOURCE MATERIAL CONTAINER
- Publication number 20190180988
- Publication date Jun 13, 2019
- TOKYO ELECTRON LIMITED
- Yuichi FURUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR TRANSFERRING SUBSTRATE FOR FORMING COMPUND SE...
- Publication number 20160148829
- Publication date May 26, 2016
- TOKYO ELECTRON LIMITED
- Eisuke MORISAKI
- H01 - BASIC ELECTRIC ELEMENTS

Tomohisa KIMOTO

Person

Patents Grantslast 30 patents

Raw material supply apparatus and film forming apparatus

Pipe heating device and substrate processing apparatus

Valve device, processing apparatus, and control method

Source material container

Patents Applicationslast 30 patents

GAS SUPPLY DEVICE AND GAS SUPPLY METHOD

RAW MATERIAL SUPPLY APPARATUS AND FILM FORMING APPARATUS

Pipe Heating Device and Substrate Processing Apparatus

VALVE DEVICE, PROCESSING APPARATUS, AND CONTROL METHOD

SOURCE MATERIAL CONTAINER

DEVICE AND METHOD FOR TRANSFERRING SUBSTRATE FOR FORMING COMPUND SE...