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Tomohisa MARUYAMA

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  • Yamanashi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Tungsten film forming method
    • Patent number 9,536,745
    • Issue date Jan 3, 2017
    • Tokyo Electron Limited
    • Kensaku Narushima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20160233099
    • Publication date Aug 11, 2016
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS