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Tomokatsu Sato
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Processing fluid supply device, substrate processing device, proces...
Patent number
10,761,422
Issue date
Sep 1, 2020
SCREEN Holdings Co., Ltd.
Masahiro Miyagi
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Processing fluid supply device, substrate processing device, proces...
Patent number
10,133,173
Issue date
Nov 20, 2018
SCREEN Holdings Co., Ltd.
Masahiro Miyagi
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Ionized gas current emission type dust-free ionizer
Patent number
7,397,647
Issue date
Jul 8, 2008
Techno Ryowa Ltd.
Akira Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ionized air flow discharge type non-dusting ionizer
Patent number
7,126,807
Issue date
Oct 24, 2006
Techno Ryowa Ltd.
Akira Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
Publication number
20180292746
Publication date
Oct 11, 2018
SCREEN Holdings Co., Ltd.
Masahiro MIYAGI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESSING FLUID SUPPLY DEVICE, SUBSTRATE PROCESSING DEVICE, PROCES...
Publication number
20150264790
Publication date
Sep 17, 2015
SCREEN Holdings Co., Ltd.
Masahiro Miyagi
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Ionized gas current emission type dust-free ionizer
Publication number
20060279897
Publication date
Dec 14, 2006
Akira Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ionized air flow discharge type non-dusting ionizer
Publication number
20040218315
Publication date
Nov 4, 2004
Akira Mizuno
H01 - BASIC ELECTRIC ELEMENTS