Tomokazu Kobayashi

Person

  • Tokyo, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER CONVEYANCE DEVICE

    • Publication number 20240379385
    • Publication date Nov 14, 2024
    • HITACHI HIGH-TECH CORPORATION
    • Katsutoshi KOBAYASHI
    • F28 - HEAT EXCHANGE IN GENERAL