Tomokazu Sushihara

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Matsudo-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma-processing apparatus
- Patent number 7,582,185
- Issue date Sep 1, 2009
- Canon Kabushiki Kaisha
- Yukito Aota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming silicon nitride deposited film
- Patent number 6,881,684
- Issue date Apr 19, 2005
- Canon Kabushiki Kaisha
- Yukito Aota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THIN-FILM FORMATION SYSTEM AND ORGANIC EL DEVICE MANUFACTURING SYSTEM
- Publication number 20120103254
- Publication date May 3, 2012
- Canon Kabushiki Kaisha
- Tomokazu Sushihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING FILM AND FILM DEPOSITION APPARATUS
- Publication number 20100078113
- Publication date Apr 1, 2010
- Canon Kabushiki Kaisha
- Tomokazu Sushihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SYSTEM AND VAPOR DEPOSITION METHOD
- Publication number 20090061084
- Publication date Mar 5, 2009
- Canon Kabushiki Kaisha
- Takahide Onuma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-processing apparatus
- Publication number 20040163593
- Publication date Aug 26, 2004
- Canon Kabushiki Kaisha
- Yukito Aota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming silicon nitride deposited film
- Publication number 20040043637
- Publication date Mar 4, 2004
- Yukito Aota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...