Tomokazu Taki

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Detection apparatus, lithography apparatus, and article manufacturi...
- Patent number 11,934,098
- Issue date Mar 19, 2024
- Canon Kabushiki Kaisha
- Tomokazu Taki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection apparatus, lithography apparatus, article manufacturing m...
- Patent number 11,829,083
- Issue date Nov 28, 2023
- Canon Kabushiki Kaisha
- Tomokazu Taki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement apparatus, overlay inspection apparatus, posit...
- Patent number 11,372,342
- Issue date Jun 28, 2022
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprinting apparatus, device fabrication method, and imprinting method
- Patent number 10,001,702
- Issue date Jun 19, 2018
- Canon Kabushiki Kaisha
- Takashi Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURI...
- Publication number 20230194980
- Publication date Jun 22, 2023
- Canon Kabushiki Kaisha
- TOMOKAZU TAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, ARTICLE MANUFACTURING M...
- Publication number 20210318626
- Publication date Oct 14, 2021
- Canon Kabushiki Kaisha
- Tomokazu Taki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITION MEASUREMENT APPARATUS, OVERLAY INSPECTION APPARATUS, POSIT...
- Publication number 20210263432
- Publication date Aug 26, 2021
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINTING APPARATUS, DEVICE FABRICATION METHOD, AND IMPRINTING METHOD
- Publication number 20140339721
- Publication date Nov 20, 2014
- Canon Kabushiki Kaisha
- Takashi Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY