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Tomoki Haneishi
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Oshu-Shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Film deposition apparatus and substrate processing apparatus
Patent number
8,673,079
Issue date
Mar 18, 2014
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM DEPOSITION APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20100050943
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESS APPARATUS, AND TURNTABLE
Publication number
20100050944
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS, SUBSTRATE PROCESSING APPARATUS, FILM DEP...
Publication number
20100055312
Publication date
Mar 4, 2010
TOKYO ELECTRON LIMITED
HITOSHI KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas supply system, gas supply method, method of cleaning thin film...
Publication number
20080105194
Publication date
May 8, 2008
Ken Nakao
B08 - CLEANING