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Tomoki Suemasa
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Nakakoma-gun, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Gas treatment method
Patent number
9,418,866
Issue date
Aug 16, 2016
Tokyo Electron Limited
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Oxide etching method
Patent number
9,384,993
Issue date
Jul 5, 2016
Tokyo Electron Limited
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
6,670,276
Issue date
Dec 30, 2003
Tokyo Electron Limited
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
6,642,149
Issue date
Nov 4, 2003
Tokyo Electron Limited
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
6,089,181
Issue date
Jul 18, 2000
Tokyo Electron Limited
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Gas Treatment Method
Publication number
20150170931
Publication date
Jun 18, 2015
TOKYO ELECTRON LIMITED
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OXIDE ETCHING METHOD
Publication number
20150079801
Publication date
Mar 19, 2015
TOKYO ELECTRON LIMITED
Tomoki SUEMASA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method
Publication number
20030054647
Publication date
Mar 20, 2003
Tomoki Suemasa
H01 - BASIC ELECTRIC ELEMENTS