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Tomoki Tanaka
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Allen, TX, US
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last 30 patents
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Patent Grant
Jet coating method for semiconductor processing
Patent number
6,558,877
Issue date
May 6, 2003
Ball Semiconductor, Inc.
Akihito Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method and system for making a micromachine device with a gas perme...
Publication number
20020132113
Publication date
Sep 19, 2002
Ball Semiconductor, Inc.
Tomoki Tanaka
B81 - MICRO-STRUCTURAL TECHNOLOGY