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Tomoko Sekiguchi
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Tokyo, JP
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last 30 patents
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Patent Grant
Method for estimating shape before shrink and CD-SEM apparatus
Patent number
9,830,524
Issue date
Nov 28, 2017
Hitachi High-Technologies Corporation
Tomoko Sekiguchi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Measuring method, data processing apparatus and electron microscope...
Patent number
9,305,744
Issue date
Apr 5, 2016
Hitachi High-Technologies Corporation
Takeyoshi Ohashi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD FOR ESTIMATING SHAPE BEFORE SHRINK AND CD-SEM APPARATUS
Publication number
20150036914
Publication date
Feb 5, 2015
Hitachi High-Technologies Corporation
Tomoko Sekiguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASURING METHOD, DATA PROCESSING APPARATUS AND ELECTRON MICROSCOPE...
Publication number
20140246585
Publication date
Sep 4, 2014
Hitachi High-Technologies Corporation
Takeyoshi Ohashi
G01 - MEASURING TESTING