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Tomoko YANAGITA
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Tokyo, JP
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last 30 patents
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Patent Grant
Film formation method and film formation apparatus
Patent number
9,786,494
Issue date
Oct 10, 2017
Tokyo Electron Limited
Yasunori Kumagai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PRODUCING PYROMELLITIC DIANHYDRIDE, PYROMELLITIC DIANHYD...
Publication number
20160214991
Publication date
Jul 28, 2016
L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
Kohei TARUTANI
C07 - ORGANIC CHEMISTRY
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Patent Application
FILM FORMATION METHOD AND FILM FORMATION APPARATUS
Publication number
20150064931
Publication date
Mar 5, 2015
TOKYO ELECTRON LIMITED
Yasunori KUMAGAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...