Tomomasa ISHIDA

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,651,029
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186599
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20080083501
- Publication date Apr 10, 2008
- Kenichiro ARAI
- H01 - BASIC ELECTRIC ELEMENTS