Tomomasa Nishida

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Osaka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 9,640,368
- Issue date May 2, 2017
- Tokyo Electron Limited
- Naoyuki Umehara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20140345802
- Publication date Nov 27, 2014
- Naoyuki Umehara
- H01 - BASIC ELECTRIC ELEMENTS