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Tomomi Sakata
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Saitama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a semiconductor device having MEMS
Patent number
7,482,196
Issue date
Jan 27, 2009
Nippon Telegraph and Telephone Corporation
Masami Urano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device having MEMS
Patent number
7,208,809
Issue date
Apr 24, 2007
Nippon Telegraph and Telephone Corporation
Masami Urano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromachine and manufacturing method
Patent number
7,189,625
Issue date
Mar 13, 2007
Nippon Telegraph and Telephone Corporation
Hiromu Ishii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor device having MEMS
Publication number
20060115920
Publication date
Jun 1, 2006
Masami Urano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromachine and manufacturing method
Publication number
20060027839
Publication date
Feb 9, 2006
Hiromu Ishii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor device having MEMS
Publication number
20040063325
Publication date
Apr 1, 2004
Masami Urano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromachine and manufacturing method therefor
Publication number
20030227035
Publication date
Dec 11, 2003
Hiromu Ishii
B81 - MICRO-STRUCTURAL TECHNOLOGY