Tomonao Kuwada

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Tsukui-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Shower head structure and cleaning method thereof
- Patent number 6,905,079
- Issue date Jun 14, 2005
- Tokyo Electron Limited
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Shower head structure and cleaning method thereof
- Publication number 20050082385
- Publication date Apr 21, 2005
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower head structure and cleaning method thereof
- Publication number 20020029748
- Publication date Mar 14, 2002
- Tomonao Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...