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Vacuum pump
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Patent number 10,982,663
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Issue date Apr 20, 2021
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Ulvac, Inc.
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Toshio Suzuki
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Multi-stage dry pump
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Patent number 8,662,869
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Issue date Mar 4, 2014
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Ulvac, Inc.
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Toshio Suzuki
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Positive-displacement dry pump
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Patent number 8,512,016
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Issue date Aug 20, 2013
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Ulvac, Inc.
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Toshio Suzuki
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F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
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Method of manufacturing vane
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Patent number 8,402,651
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Issue date Mar 26, 2013
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Ulvac, Inc.
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Tomonari Tanaka
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F05 - INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF...