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Tomonari URANO
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Nirasaki City, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
11,414,742
Issue date
Aug 16, 2022
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20180209033
Publication date
Jul 26, 2018
TOKYO ELECTRON LIMITED
Hideaki YAMASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20160240370
Publication date
Aug 18, 2016
TOKYO ELECTRON LIMITED
Hideaki YAMASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...