Tomonori ESAKI

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate liquid processing apparatus for supplying temperature-con...
- Patent number 12,281,390
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method, storage medium and substrate processin...
- Patent number 9,748,100
- Issue date Aug 29, 2017
- Tokyo Electron Limited
- Tomonori Esaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLATING METHOD AND PLATING APPARATUS
- Publication number 20240079269
- Publication date Mar 7, 2024
- TOKYO ELECTRON LIMITED
- Tomonori Esaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20220074052
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, MAINTE...
- Publication number 20170032983
- Publication date Feb 2, 2017
- TOKYO ELECTRON LIMITED
- Koshi MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM AND SUBSTRATE PROCESSIN...
- Publication number 20160163560
- Publication date Jun 9, 2016
- TOKYO ELECTRON LIMITED
- Tomonori ESAKI
- H01 - BASIC ELECTRIC ELEMENTS