Tomonori Fujiwara

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of modifying insulating film
- Patent number 8,021,987
- Issue date Sep 20, 2011
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of modifying insulating film
- Patent number 7,655,574
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming underlying insulation film
- Patent number 7,622,402
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation apparatus and method of using the same
- Patent number 7,368,384
- Issue date May 6, 2008
- Tokyo Electron Limited
- Atsushi Endo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, film-forming apparatu...
- Patent number 7,084,023
- Issue date Aug 1, 2006
- Tokyo Electron Limited
- Shigeru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method for depositing a plurality of high-k dielectric...
- Patent number 7,041,546
- Issue date May 9, 2006
- Tokyo Electron Limited
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MODIFYING INSULATING FILM
- Publication number 20100105215
- Publication date Apr 29, 2010
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming film and film forming apparatus
- Publication number 20060216953
- Publication date Sep 28, 2006
- Shigeru Nakajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of modifying insulating film
- Publication number 20060199398
- Publication date Sep 7, 2006
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming underlying insulation film
- Publication number 20050255711
- Publication date Nov 17, 2005
- TOKYO ELECTRON LIMITED
- Takuya Sugawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Film formation apparatus and method of using the same
- Publication number 20050245099
- Publication date Nov 3, 2005
- Atsushi Endo
- B08 - CLEANING
Information Patent Application
Method of manufacturing semiconductor device, film-forming apparatu...
- Publication number 20050142716
- Publication date Jun 30, 2005
- Shigeru Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitor structure and film forming method and apparatus
- Publication number 20040195653
- Publication date Oct 7, 2004
- Yuichiro Morozumi
- H01 - BASIC ELECTRIC ELEMENTS

Tomonori Fujiwara

Person

Patents Grantslast 30 patents

Method of modifying insulating film

Method of modifying insulating film

Method for forming underlying insulation film

Film formation apparatus and method of using the same

Method of manufacturing semiconductor device, film-forming apparatu...

Film forming method for depositing a plurality of high-k dielectric...

Patents Applicationslast 30 patents

METHOD OF MODIFYING INSULATING FILM

Method of forming film and film forming apparatus

Method of modifying insulating film

Method for forming underlying insulation film

Film formation apparatus and method of using the same

Method of manufacturing semiconductor device, film-forming apparatu...

Capacitor structure and film forming method and apparatus