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Tomonori Ishikawa
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam drawing apparatus and article manufacturing m...
Patent number
8,476,607
Issue date
Jul 2, 2013
Canon Kabushiki Kaisha
Tomonori Ishikawa
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CONTROL APPARATUS, IMAGE PICKUP APPARATUS, AND LENS APPARATUS
Publication number
20240388686
Publication date
Nov 21, 2024
Canon Kabushiki Kaisha
GAKU TAKAHASHI
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING...
Publication number
20150364292
Publication date
Dec 17, 2015
Canon Kabushiki Kaisha
Tomonori Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ART...
Publication number
20140306123
Publication date
Oct 16, 2014
Canon Kabushiki Kaisha
Tomonori ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING M...
Publication number
20130011797
Publication date
Jan 10, 2013
Canon Kabushiki Kaisha
Tomonori Ishikawa
B82 - NANO-TECHNOLOGY