Tomonori Kojimaru

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,651,029
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 9,455,134
- Issue date Sep 27, 2016
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 9,005,703
- Issue date Apr 14, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 8,821,974
- Issue date Sep 2, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Kimura
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,964,042
- Issue date Jun 21, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Tomonori Kojimaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 7,243,911
- Issue date Jul 17, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Yoshitaka Abiko
- B08 - CLEANING
Information Patent Grant
Fluid heating apparatus
- Patent number 6,465,765
- Issue date Oct 15, 2002
- Omron Corporation
- Masakazu Katayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186599
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150179431
- Publication date Jun 25, 2015
- SCREEN Holdings Co., Ltd.
- Masahiro KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140283882
- Publication date Sep 25, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20120045581
- Publication date Feb 23, 2012
- Masahiro KIMURA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090032067
- Publication date Feb 5, 2009
- Tomonori Kojimaru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating apparatus
- Publication number 20050161839
- Publication date Jul 28, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshitaka Abiko
- B08 - CLEANING
Information Patent Application
Substrate treating apparatus
- Publication number 20040221880
- Publication date Nov 11, 2004
- Kabushiki Kaisha Toshiba
- Hiroshi Tomita
- B08 - CLEANING
Information Patent Application
Fluid heating apparatus
- Publication number 20010017296
- Publication date Aug 30, 2001
- Omron Corporation and Dainippon Screen Mfg. Co.,
- Masakazu Katayama
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Tomonori Kojimaru

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing method

Substrate processing method

Substrate processing method

Substrate processing apparatus and substrate processing method

Substrate treating apparatus

Fluid heating apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate treating apparatus

Substrate treating apparatus

Fluid heating apparatus