TREA

Tomonori KUWAMOTO

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film deposition apparatus
    • Patent number 9,435,026
    • Issue date Sep 6, 2016
    • Tokyo Electron Limited
    • Yu Wamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM DEPOSITION APPARATUS
    • Publication number 20140290578
    • Publication date Oct 2, 2014
    • TOKYO ELECTRON LIMITED
    • Yu WAMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...