TREA

Tomonori MIWA

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method and substrate processing apparatus
    • Patent number 11,264,248
    • Issue date Mar 1, 2022
    • Tokyo Electron Limited
    • Yoshimitsu Kon
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,735,021
    • Issue date Aug 15, 2017
    • Tokyo Electron Limited
    • Masayuki Sawataishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 9,735,025
    • Issue date Aug 15, 2017
    • Tokyo Electron Limited
    • Masayuki Sawataishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method for etching etching target layer
    • Patent number 9,418,863
    • Issue date Aug 16, 2016
    • Tokyo Electron Limited
    • Shin Hirotsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Focus ring and plasma processing apparatus
    • Patent number 7,658,816
    • Issue date Feb 9, 2010
    • Tokyo Electron Limited
    • Akira Koshiishi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200185229
    • Publication date Jun 11, 2020
    • TOKYO ELECTRON LIMITED
    • Yoshimitsu KON
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160351406
    • Publication date Dec 1, 2016
    • TOKYO ELECTRON LIMITED
    • Masayuki Sawataishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20160351407
    • Publication date Dec 1, 2016
    • TOKYO ELECTRON LIMITED
    • Masayuki Sawataishi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR ETCHING ETCHING TARGET LAYER
    • Publication number 20150332932
    • Publication date Nov 19, 2015
    • TOKYO ELECTRON LIMITED
    • Shin HIROTSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Focus ring and plasma processing apparatus
    • Publication number 20070169891
    • Publication date Jul 26, 2007
    • TOKYO ELECTRON LIMITED
    • Akira Koshiishi
    • H01 - BASIC ELECTRIC ELEMENTS