Tomonori SHIN

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Coating and developing apparatus, operating method for same, and st...
- Patent number 7,844,359
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Tomonori Shin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATING AND DEVELOPING APPARATUS, OPERATING METHOD FOR SAME, AND ST...
- Publication number 20080299502
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Tomonori SHIN
- H01 - BASIC ELECTRIC ELEMENTS