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Tomonori Uchimaru
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Hadano-shi, JP
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last 30 patents
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Patent Application
Plasma resistant member
Publication number
20050227118
Publication date
Oct 13, 2005
Toshiba Ceramics Co., Ltd.
Tomonori Uchimaru
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Plasma resistant member
Publication number
20030051811
Publication date
Mar 20, 2003
Toshiba Ceramics Co., Ltd.
Tomonori Uchimaru
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...