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Tomotaka SHIBAZAKI
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Linear motor for vacuum and vacuum processing apparatus
Patent number
11,418,101
Issue date
Aug 16, 2022
Hitachi High-Technologies Corporation
Tomotaka Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage apparatus and charged particle beam apparatus
Patent number
11,049,687
Issue date
Jun 29, 2021
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
G01 - MEASURING TESTING
Information
Patent Grant
Stage apparatus, and charged particle beam apparatus
Patent number
10,879,033
Issue date
Dec 29, 2020
HITACHI HIGH-TECH CORPORATION
Akira Nishioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,658,151
Issue date
May 19, 2020
HITACHI HIGH-TECH CORPORATION
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage device and charged particle beam device
Patent number
10,600,614
Issue date
Mar 24, 2020
Hitachi High-Technologies Corporation
Motohiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Charged Particle Beam Device
Publication number
20210066025
Publication date
Mar 4, 2021
HITACHI HIGH-TECH CORPORATION
Keiichiro HOSOBUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20200176217
Publication date
Jun 4, 2020
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Linear Motor for Vacuum and Vacuum Processing Apparatus
Publication number
20200126749
Publication date
Apr 23, 2020
Hitachi High-Technologies Corporation
Tomotaka SHIBAZAKI
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
STAGE APPARATUS, AND CHARGED PARTICLE BEAM APPARATUS
Publication number
20190378678
Publication date
Dec 12, 2019
Hitachi High-Technologies Corporation
Akira NISHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190259567
Publication date
Aug 22, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE AND CHARGED PARTICLE BEAM DEVICE
Publication number
20190103246
Publication date
Apr 4, 2019
Hitachi High-Technologies Corporation
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS