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Tomotake Morita
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Yamagata, JP
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Patents Grants
last 30 patents
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Patent Grant
Wafer lapping method capable of achieving a stable abrasion rate
Patent number
6,102,778
Issue date
Aug 15, 2000
NEC Corporation
Tomotake Morita
B24 - GRINDING POLISHING
Information
Patent Grant
Method of manufacturing semiconductor devices
Patent number
5,961,794
Issue date
Oct 5, 1999
NEC Corporation
Tomotake Morita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Polishing apparatus having retainer ring rounded along outer periph...
Patent number
5,944,590
Issue date
Aug 31, 1999
NEC Corporation
Akira Isobe
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
Wafer holder protecting wafer against electrostatic breakdown
Publication number
20030045218
Publication date
Mar 6, 2003
NEC Corporation
Masayoshi Kasahara
B24 - GRINDING POLISHING