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Tomotsugu Ohashi
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Singapore, SG
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Patents Grants
last 30 patents
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Patent Grant
Method of etching backside Si substrate of SOI substrate to expose...
Patent number
9,240,505
Issue date
Jan 19, 2016
TOHOKU UNIVERSITY
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF ETCHING OF SOI SUBSTRATE, AND BACK-ILLUMINATED PHOTOELECT...
Publication number
20130320477
Publication date
Dec 5, 2013
TOHOKU UNIVERSITY
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS