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Tomoya Kubota
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Nirasaki-shi, JP
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Patent Grant
Processing apparatus and gas discharge suppressing member
Patent number
7,622,017
Issue date
Nov 24, 2009
Tokyo Electron Limited
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Processing apparatus and gas discharge suppressing member
Publication number
20050011456
Publication date
Jan 20, 2005
TOKYO ELECTRON LIMITED
Shinji Himori
H01 - BASIC ELECTRIC ELEMENTS