Tomoya ONITSUKA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment method and thermal treatment apparatus
- Patent number 10,656,526
- Issue date May 19, 2020
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT METHOD, SUBSTRATE TREATMENT APPARATUS, AND COMP...
- Publication number 20240120217
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240038533
- Publication date Feb 1, 2024
- TOKYO ELECTRON LIMITED
- Hiroki TADATOMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
- Publication number 20240027923
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Tomoya ONITSUKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20230176484
- Publication date Jun 8, 2023
- Tokyo Electron Limited
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
- Publication number 20180164689
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS