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Tomoya TAMURA
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Kanagawa, JP
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Patents Grants
last 30 patents
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Patent Grant
Defect inspection device, defect inspection method, and defect insp...
Patent number
9,240,041
Issue date
Jan 19, 2016
Lasertec Corporation
Tomoya Tamura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection apparatus, inspection method, and manufacturing method o...
Patent number
7,548,309
Issue date
Jun 16, 2009
Lasertec Corporation
Haruhiko Kusunose
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND DEFECT INSP...
Publication number
20130322735
Publication date
Dec 5, 2013
Lasertec Corporation
Tomoya Tamura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION APPARATUS, INSPECTION METHOD, AND MANUFACTURING METHOD O...
Publication number
20080192238
Publication date
Aug 14, 2008
Lasertec Corporation
Haruhiko KUSUNOSE
G01 - MEASURING TESTING