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Tomoya Ujiie

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  • Kurokawa-gun, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,869,753
    • Issue date Jan 9, 2024
    • Tokyo Electron Limited
    • Takahiro Senda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220148861
    • Publication date May 12, 2022
    • TOKYO ELECTRON LIMITED
    • Wataru SHIMIZU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20220122814
    • Publication date Apr 21, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro Senda
    • H01 - BASIC ELECTRIC ELEMENTS