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Tomoyasu MIYASHITA
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Heating part, substrate processing apparatus, and method of manufac...
Patent number
11,198,935
Issue date
Dec 14, 2021
Kokusai Electric Corporation
Shinobu Sugiura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and manufacturing method of semicond...
Patent number
10,998,205
Issue date
May 4, 2021
Kokusai Electric Corporation
Tomoyasu Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
9,394,607
Issue date
Jul 19, 2016
Hitachi Kokusai Electric Inc.
Masaya Nishida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
8,453,600
Issue date
Jun 4, 2013
Hitachi Kokusai Electric Inc.
Tomoyasu Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD OF SEMICOND...
Publication number
20200090965
Publication date
Mar 19, 2020
Kokusai Electric Corporation
Tomoyasu MIYASHITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATING PART, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFAC...
Publication number
20170107620
Publication date
Apr 20, 2017
Hitachi Kokusai Electric Inc.
Shinobu SUGIURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20150267296
Publication date
Sep 24, 2015
Hitachi Kokusai Electric Inc.
Masaya NISHIDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING SUBSTRATE
Publication number
20120052203
Publication date
Mar 1, 2012
Hitachi Kokusai Electric Inc.
Tomoyasu Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus
Publication number
20090071405
Publication date
Mar 19, 2009
Hitachi Kokusan Electric Inc.
Tomoyasu Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...