Tomoyasu SHOJO

Person

Kokubunji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam apparatus
- Patent number 10,121,632
- Issue date Nov 6, 2018
- Hitachi High-Technologies Corporation
- Nobuhiro Okai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and detection method using said device
- Patent number 9,799,483
- Issue date Oct 24, 2017
- Hitachi High-Technologies Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,384,940
- Issue date Jul 5, 2016
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 9,159,533
- Issue date Oct 13, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle microscope
- Patent number 8,859,962
- Issue date Oct 14, 2014
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam microscope
- Patent number 8,841,612
- Issue date Sep 23, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 8,785,890
- Issue date Jul 22, 2014
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Defect review system and method, and program
- Patent number 8,467,595
- Issue date Jun 18, 2013
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus permitting high resolution and high...
- Patent number 8,431,915
- Issue date Apr 30, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,431,893
- Issue date Apr 30, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,405,026
- Issue date Mar 26, 2013
- Hitachi High-Technologies Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus permitting high-resolution and high...
- Patent number 8,389,935
- Issue date Mar 5, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 8,207,498
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle apparatus, scanning electron microscope, and sampl...
- Patent number 8,026,481
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and electron beam inspection method
- Patent number 7,875,849
- Issue date Jan 25, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, scanning electron microscope, and...
- Patent number 7,557,347
- Issue date Jul 7, 2009
- Hitachi High-Technologies Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20170316915
- Publication date Nov 2, 2017
- Hitachi High-Technologies Corporation
- Nobuhiro OKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND DETECTION METHOD USING SAID DEVICE
- Publication number 20170053777
- Publication date Feb 23, 2017
- Hitachi High-Technologies Corporation
- Tomoyasu SHOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150294833
- Publication date Oct 15, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...
- Publication number 20140326879
- Publication date Nov 6, 2014
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED-PARTICLE MICROSCOPE
- Publication number 20140197313
- Publication date Jul 17, 2014
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...
- Publication number 20130228701
- Publication date Sep 5, 2013
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Microscope
- Publication number 20130126733
- Publication date May 23, 2013
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...
- Publication number 20120280126
- Publication date Nov 8, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
Electron Beam Apparatus and Electron Beam Inspection Method
- Publication number 20120261574
- Publication date Oct 18, 2012
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE MICROSCOPE
- Publication number 20120119087
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...
- Publication number 20120004879
- Publication date Jan 5, 2012
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM
- Publication number 20110129142
- Publication date Jun 2, 2011
- Hitachi High-Technologies Corporation
- Noritsugu Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Apparatus And Electron Beam Inspection Method
- Publication number 20110101223
- Publication date May 5, 2011
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20100059676
- Publication date Mar 11, 2010
- Hitachi High-Technologies Corporation
- Tomoyasu SHOJO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...
- Publication number 20090256076
- Publication date Oct 15, 2009
- Hitachi High-Technologies Corporation
- Muneyuki FUKUDA
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus, scanning electron microscope, and...
- Publication number 20080121803
- Publication date May 29, 2008
- Hitachi High-Technologies, Corporation
- Tomoyasu Shojo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Apparatus and Electron Beam Inspection Method
- Publication number 20080099673
- Publication date May 1, 2008
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle apparatus, scanning electron microscope, and sampl...
- Publication number 20070181807
- Publication date Aug 9, 2007
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS

Tomoyasu SHOJO

Person

Patents Grantslast 30 patents

Charged particle beam apparatus

Charged particle beam device and detection method using said device

Charged particle beam apparatus

Charged particle beam apparatus permitting high-resolution and high...

Charged-particle microscope

Charged particle beam microscope

Charged particle beam apparatus permitting high-resolution and high...

Defect review system and method, and program

Charged particle beam apparatus permitting high resolution and high...

Electron beam apparatus and electron beam inspection method

Charged particle beam apparatus

Charged particle beam apparatus permitting high-resolution and high...

Electron beam apparatus and electron beam inspection method

Charged particle apparatus, scanning electron microscope, and sampl...

Electron beam apparatus and electron beam inspection method

Charged particle beam apparatus, scanning electron microscope, and...

Patents Applicationslast 30 patents

Charged Particle Beam Apparatus

CHARGED PARTICLE BEAM DEVICE AND DETECTION METHOD USING SAID DEVICE

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...

CHARGED-PARTICLE MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...

Charged Particle Beam Microscope

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH RESOLUTION AND HIGH...

Electron Beam Apparatus and Electron Beam Inspection Method

CHARGED-PARTICLE MICROSCOPE

CHARGED PARTICLE APPARATUS, SCANNING ELECTRON MICROSCOPE, AND SAMPL...

DEFECT REVIEW SYSTEM AND METHOD, AND PROGRAM

Electron Beam Apparatus And Electron Beam Inspection Method

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH...

Charged particle beam apparatus, scanning electron microscope, and...

Electron Beam Apparatus and Electron Beam Inspection Method

Charged particle apparatus, scanning electron microscope, and sampl...